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Phosphorus Trichloride for Industrial Use
Premium phosphorus trichloride for industrial use ( HG/T2970-2009)
Item |
Index |
Phosphorus trichloride content |
≥99.5 % |
Free phosphorus content |
≤ 0.05% |
Boiling range (74.5 °C -77.5 °C ) ( volume fraction ) |
≤ 0.005% |
Orthophosphoric acid content ( as PO43 Count ) |
≤ 0.05% |
Phosphorus trichloride is mainly used as a semiconductor dopant and a raw material for high-purity phosphorus. Throughout the circuit production process, the quality of phosphorus trichloride plays an important role of controlling contamination and improving integration circuit yield.